An Introduction to mems (Micro-electromechanical Systems)

An Introduction to MEMS 

 

 

Prime Faraday Technology Watch – January 2002 

1

 

1. Introduction 

 

This report deals with the emerging field of micro-electromechanical systems, or MEMS.  

MEMS is a process technology used to create tiny integrated devices or systems that combine 

mechanical and electrical components.  They are fabricated using integrated circuit (IC) batch 

processing techniques and can range in size from a few micrometers to millimetres.  These 

devices (or systems) have the ability to sense, control and actuate on the micro scale, and 

generate effects on the macro scale. 

 

The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing 

expertise from a wide and diverse range of technical areas including integrated circuit 

fabrication technology, mechanical engineering, materials science, electrical engineering, 

chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and 

packaging.  The complexity of MEMS is also shown in the extensive range of markets and 

applications that incorporate MEMS devices.  MEMS can be found in systems ranging across 

automotive, medical, electronic, communication and defence applications.  Current MEMS 

devices include accelerometers for airbag sensors, inkjet printer heads, computer disk drive 

read/write heads, projection display chips, blood pressure sensors, optical switches, 

microvalves, biosensors and many other products that are all manufactured and shipped in 

high commercial volumes. 

 

MEMS has been identified as one of the most promising technologies for the 21

st

 Century and 

has the potential to revolutionize both industrial and consumer products by combining silicon-

based microelectronics with micromachining technology.  Its techniques and microsystem-

based devices have the potential to dramatically affect of all of our lives and the way we live.  

If semiconductor microfabrication was seen to be the first micromanufacturing revolution, 

MEMS is the second revolution. 

 

This report introduces the field of MEMS and is divided into four main sections.  In the first 

section, the reader is introduced to MEMS, its definitions, history, current and potential 

applications, as well as the state of the MEMS market and issues concerning miniaturization.  

The second section deals with the fundamental fabrication methods of MEMS including 

photolithography, bulk micromachining, surface micromachining and high-aspect-ratio 

micromachining; assembly, system integration and packaging of MEMS devices is also 

described here.  The third section reviews the range of MEMS sensors and actuators, the 

phenomena that can be sensed or acted upon with MEMS devices, and a brief description of 

the basic sensing and actuation mechanisms.  The final section illustrates the challenges 

facing the MEMS industry for the commercialisation and success of MEMS. 

 

 

 

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