An Introduction to mems (Micro-electromechanical Systems)

Document Outline

• PRIME Faraday Partnership
• Page
• References…………………………………………………………………………………. 44
• Appendix A Glossary of Terms……………………………………………………….. 47
  • • • • • • Appendix B Sources of MEMS Information and Advice…………………………… 49
• Transducer
• A transducer is a device that transforms one form of signal or energy into another form.  The term transducer can therefore be used to include both sensors and actuators and is the most generic and widely used term in MEMS.
• Sensor
• Actuator
• Discovery
  • • • • 2.4.1  Established MEMS Applications
        • 2.4.2  New MEMS Applications
          • Product Types
      • Application Sector
    • 3.3.1  Wet Etching
    • 3.3.2  Dry Etching
    • 3.4.1  Fusion Bonding
    • 3.5.1  LIGA
    • 3.5.2  Laser Micromachining
    • 3.8.1  Multi-chip Modules
    • 3.8.2  Passivation and Encapsulation
• 4.2.2  Radiation (Optical) Actuators
• 4.3.2  Thermal Actuators
• 4.4.2  Magnetic Actuators
• 4.5.2  Chemical Actuators
• References
• General References
• Specific References
• Chip
• Die
• Dielectric
• Field Effect Transistor
• A class of transistor in which current flows from a source to a drain via a channel whose resistance can be controlled by applying a voltage to a gate.
• Ferroelectric
• Gate
• Integrated Circuit (IC)
• Integrated Sensor
• Micromachine
• Microsystem
• N-type Silicon
• p-n junction
• P-type Silicon
• Sacrificial Layer
• Semiconductor
• A crystalline solid that behaves somewhere between a conductor (like iron) and an insulator (like glass).  Semiconductors are the raw materials used in active electronic and optical devices.
• Structural Layer
• Substrate
• Vertical Aspect Ratio
• Work Function
• Appendix B Sources of MEMS Information and Advice Organisations
• Industry and Academic Participants
• Conference Proceedings