An Introduction to mems (Micro-electromechanical Systems)

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A junction formed between layers of p-type semiconductor and n-type semiconductor.  The 

junction forms a potential barrier at the interface. 

Silicon doped with an element containing one fewer electron in its outer layer, like 

phosphorous.  When combined with silicon, phosphorous takes an electron from the outer 

ring of the silicon, leaving an electron hole which enables electric current to flow. 

 

Sacrificial Layer 

A layer of material that is deposited between structural layers for mechanical separation and 

isolation.  This layer is removed during the release etch to free the structural layers and allow 

mechanical devices to move relative to the substrate. 

 

Semiconductor 

A crystalline solid that behaves somewhere between a conductor (like iron) and an insulator 

(like glass).  Semiconductors are the raw materials used in active electronic and optical 

devices.