| Structural Layer
A layer of material that forms a physical structure on a substrate. A structural layer is
releasable when a sacrificial layer separates it from the substrate.
Substrate
A base material, typically a semiconductor, on which a second material is to be deposited or
adsorbed.
Vertical Aspect Ratio
The ratio of the height or depth of a mechanical structure perpendicular to the substrate to the
width of the structure.
Work Function
The minimum energy required for an electron at the Fermi energy of a conductor to escape
from the conductor.
An Introduction to MEMS
Prime Faraday Technology Watch – January 2002
49
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