Integrated Circuit (IC)
A chip that contains electrical components such as transistors, resistors and capacitors
connected by wiring, to form a circuit designed to perform some specific task or tasks.
Integrated Sensor
A sensor that is integrated with signal processing circuits in a single package (usually a
silicon chip).
Micromachine
Micromachines are composed of functional elements only a few millimetres in size and are
capable of performing complex microscopic tasks.
Microsystem
An intelligent miniaturised system comprising sensing, processing and/or actuating functions
integrated onto a single chip or multi-chip hybrid.
N-type Silicon
Silicon that is negatively charged by doping with an element, such as boron, which contains
an extra electron. The extra electron enables electric current to flow through the material.
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