Conference Proceedings
The following MEMS-based conferences are held on an annual basis or in alternate years.
Their proceedings are a valuable source of current activity in the MEMS field.
Memsleadership.com and Memscenter.com offer updated calendar lists for most MEMS
conferences and events.
1. Eurosensors
2. International Conference on Solid-State Sensors and Actuators
An Introduction to MEMS
Prime Faraday Technology Watch – January 2002
51
3. Micro Electro Mechanical Systems Workshop/MEMS
4. Micro Total Analysis Systems/µTAS
5. Solid-State Sensor and Actuator Workshop
Textbooks
Good sources of introductory information can be found in books listed in the References
Section. Particular attention is drawn to the following titles, which include all of the most
important and fundamental papers up to 1990 in the field of MEMS, microsensors and
micromechanics.
1. Microsensors, Muller, R.S., Howe, R.T., Senturia, S.D., Smith, R.L., and White, R.M.
[Eds.], IEEE Press, New York, NY, 1991.
2. Micromechanics and MEMS: Classic and Seminal Paper to 1990, Trimmer, W.S., IEEE
Press,
New York, NY, 1997.
