| An Introduction to MEMS
Prime Faraday Technology Watch – January 2002
iii
Contents
Page
1. Introduction…………………………………………………………………………..
1
2.
Micro-electromechanical Systems (MEMS)………………………………………... 1
2.1 What
is
MEMS?…………………………………………………………………...
1
2.2 Definitions and Classifications…………………………………………………… 3
2.3 History…………………………………………………………………………… 4
2.4 Applications……………………………………………………………………….
6
2.4.1 Established
MEMS
Applications…………………………………………………..
7
2.4.2
New MEMS Applications…………………………………………………………
11
2.5 MEMS
Market……………………………………………………………………14
2.6 Miniaturization
Issues……………………………………………………………
16
3.
Chia sẻ với bạn bè của bạn: | 
