4. MEMS
Transducers…………………………………………………………………
30
4.1 Mechanical
Transducers………………………………………………………….31
4.1.1 Mechanical
Sensors……………………………………………………………….
31
4.1.2 Mechanical
Actuators……………………………………………….……………
32
4.2 Radiation
Transducers……………………………………………………………
34
4.2.1 Radiation
Sensors………………………………………………………………...
34
4.2.2 Radiation
(Optical)
Actuators…………………………………………………….
34
4.3 Thermal
Transducers……………………………………………………………..35
4.3.1 Thermal
Sensors…………………………………………………………………..
35
4.3.2 Thermal
Actuators……………………………………………………………..….
35
4.4 Magnetic
Transducers……………………………………………………………
36
4.4.1 Magnetic
Sensors…………………………………………………………………
36
4.4.2 Magnetic
Actuators…………………………………………………………….…
37
4.5 Chemical and Biological Transducers…………………………………………… 37
4.5.1 Chemical and Biological Sensors………………………………………………...
37
4.5.2 Chemical
Actuators……………………………………………………………….
39
4.6 Microfluidic
Devices……………………………………………………………. 39
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