| An Introduction to MEMS
Prime Faraday Technology Watch – January 2002
Published in 2002 by
PRIME Faraday Partnership
Wolfson School of Mechanical and Manufacturing Engineering
Loughborough University, Loughborough, Leics LE11 3TU
http://www.primetechnologywatch.org.uk
© 2002 Loughborough University
ISBN 1-84402-020-7
Whilst the advice and information in this publication is believed to be
true and accurate at the time of publication, neither the author nor the
publisher assume any legal responsibility or liability for any error or
omission that may have been made.
Comments on this publication are welcomed. Please send them to
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