2.2 Definitions and Classifications
This section defines some of the key terminology and classifications associated with MEMS.
It is intended to help the reader and newcomers to the field of micromachining become
familiar with some of the more common terms. A more detailed glossary of terms has been
included in Appendix A.
Figure 3 illustrates the classifications of microsystems technology (MST). Although MEMS
is also referred to as MST, strictly speaking, MEMS is a process technology used to create
these tiny mechanical devices or systems, and as a result, it is a subset of MST.
Figure 3. Classifications of microsystems technology [3].
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