An Introduction to mems (Micro-electromechanical Systems)

An Introduction to MEMS 

 

 

Prime Faraday Technology Watch – January 2002 

5

 

 

1960’s 

1961 

First silicon pressure sensor demonstrated 

 

1967 

Invention of surface micromachining.  Westinghouse creates the Resonant Gate 

Field Effect Transistor, (RGT).  Description of use of sacrificial material to free 

micromechanical devices from the silicon substrate. 

 

1970’s 

1970 

First silicon accelerometer demonstrated 

 

1979 

First micromachined inkjet nozzle 

 

1980’s 

Early 1980’s: first experiments in surface micromachined silicon.  Late 1980’s: 

micromachining leverages microelectronics industry and widespread 

experimentation and documentation increases public interest.   

 

1982 

Disposable blood pressure transducer 

 

1982 

“Silicon as a Mechanical Material” [9].  Instrumental paper to entice the scientific 

community – reference for material properties and etching data for silicon. 

 

1982 LIGA 

Process 

 

1988 

First MEMS conference 

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