3.5.2 Laser Micromachining
Most laser micromachining processes are not parallel and hence not fast enough for effective
MEMS fabrication. Nonetheless, they have utility in specialty micromachining or making
moulds. Excimer laser micromachining is used particularly for the micromachining of
organic materials (plastics, polymers etc.) as material is not removed by burning or
vaporization. Hence, material adjacent to the machined area is not melted or distorted by
heating effects. Lasers have found other applications in MEMS but only in a limited capacity;
laser drilling, laser annealing and etching are the most common forms.
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