An Introduction to mems (Micro-electromechanical Systems)

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an-introduction-to-mems

MEMS has been identified as one of the most promising technologies for the 21 st

Prime Faraday Technology Watch

ISBN 1-84402-020-7

An Introduction to MEMS

January 2002

An Introduction to MEMS (Micro-electromechanical Systems)

MEMS has been identified as one of the most promising technologies for

the 21

st

Century and has the potential to revolutionize both industrial and

consumer products by combining silicon-based microelectronics with

micromachining technology. Its techniques and microsystem-based

devices have the potential to dramatically affect of all of our lives and the

way we live.

This report presents a general introduction to the field of MEMS, with

emphasis on its commercial applications and device fabrication methods.

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