| An Introduction to MEMS
Prime Faraday Technology Watch – January 2002
35
devices and integrated optics to enable the control and analysis of optical acquired data. A
brief selection of optical MEMS components includes:
•
optical waveguides to route optical energy from one region to another. MEMS
techniques are commonly employed to enable waveguide-to-photodiode coupling.
•
fibre-optic couplers incorporate micromachined grooves and channels as mechanical
couplings for fibre-optic components. Anisotropic wet etching, DRIE and HARM
methods are typically used.
•
micromirrors with flawless surfaces can be achieved using anisotropic etching to yield
perfect crystal plane surfaces.
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