4.2.2 Radiation (Optical) Actuators
The two most common forms of optical actuation include light emitting diodes and light
modulators such as liquid crystal displays and reflective micromechanical light modulators
(technology used in Texas Instrument’s DMD projection system).
Optical devices can either be active or passive; active devices include laser emitting diodes,
photodiodes and optical switches. Passive devices include couplers, mirrors, wavelength
division multiplexers, polarisers etc. Their application is important in both optical MEMS
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