An Introduction to mems (Micro-electromechanical Systems)

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MEMS fabrication processes have reached the stage where mass manufacture of such devices 

level of functionality can be achieved for less than a dollar.  Agere Systems (previously 

known as the microelectronics division of Lucent Technologies), Corning, JDS Uniphase and 

Sycamore Networks are some of the leading companies in this field. 

iii) RF 

RF MEMS is one of the fastest growing areas in commercial MEMS technology.  RF MEMS 

are designed specifically for electronics in mobile phones and other wireless communication 

applications such as radar, global positioning satellite systems (GPS) and steerable antennae.  

MEMS has enabled the performance, reliability and function of these devices to be increased 

while driving down their size and cost at the same time (Figure 13). 

microphones and  switches).  These low-loss ultra-miniature and highly integrative RF 

functions can and will eventually replace classical RF elements and enable a new generation 

of RF devices.  As it can be seen today, if RF MEMS components continue to replace 

traditional components in today’s mobile phones, then phones could become extremely small 

(the size of wristwatch is not too far away), require little battery power and may even be 

cheaper. 

of a pin head and able to tilt in various directions to steer light [20,21]. 

Figure 13. (a) A miniature acoustic resonator, shown in the 

foreground, is one-fifth the size of a traditional component used in 

mobile phones and other wireless communications devices [22], 

and (b) on-chip micro-microphones may make it possible to build 

radios on a chip [20,21]. 

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