An Introduction to mems (Micro-electromechanical Systems)

Most laser micromachining processes are not parallel and hence not fast enough for effective 

MEMS fabrication.  Nonetheless, they have utility in specialty micromachining or making 

moulds.  Excimer laser micromachining is used particularly for the micromachining of 

organic materials (plastics, polymers etc.) as material is not removed by burning or 

vaporization.  Hence, material adjacent to the machined area is not melted or distorted by 

heating effects.  Lasers have found other applications in MEMS but only in a limited capacity; 

laser drilling, laser annealing and etching are the most common forms.